Title:
AGEING DEVICE AND METHOD
Document Type and Number:
Japanese Patent JPH06118127
Kind Code:
A
Abstract:
PURPOSE: To realize the enhancement of the throughput of ageing and the enhancement of the quality of ageing due to the confirmation of the normal operation of an IC device during ageing.
CONSTITUTION: An ageing device internally equipped with the function setting the operation speed of an IC device to the optimum operation speed in the ageing of the IC device is constituted of a simple function test part 2 detecting the operation speed optimum to ageing, an ageing part 3, the control part 4 controlling the simple function test part 2 and the ageing part 3, an ageing oven control part 5 controlling an ageing oven 6 and the ageing oven 6. The accurate operation of the IC device in ageing is ensured by the ageing device 1.
Inventors:
TAKESHIGE NAOHIKO
Application Number:
JP26713892A
Publication Date:
April 28, 1994
Filing Date:
October 06, 1992
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01R31/28; H01L21/66; G01R31/26; (IPC1-7): G01R31/26; G01R31/28; H01L21/66
Attorney, Agent or Firm:
Yamato Tsutsui
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