Title:
空調設備、及び、この設備を用いた精密品製造方法
Document Type and Number:
Japanese Patent JP4721531
Kind Code:
B2
Inventors:
Yasushi Kato
Suzuki Tonokazu
Hirohisa Koriyama
Tachiro Achinami
Fujio Tanabe
Suzuki Tonokazu
Hirohisa Koriyama
Tachiro Achinami
Fujio Tanabe
Application Number:
JP2001041274A
Publication Date:
July 13, 2011
Filing Date:
February 19, 2001
Export Citation:
Assignee:
ソニー株式会社
株式会社大気社
株式会社大気社
International Classes:
F24F7/06; F24F13/08; H01L21/02
Domestic Patent References:
| JP10300146A | ||||
| JP2004152U | ||||
| JP3067847U | ||||
| JP7293988A |
Attorney, Agent or Firm:
Shuichiro Kitamura