PURPOSE: To permit easy cooling with cooling water having a high temperature by a method wherein return air, cooled through sensitive heat cooling, is mixed with outdoor air, whose temperature and humidity are regulated optimally, to supply it into a clean room.
CONSTITUTION: Air, passed through a heat exchanger 61 provided in an air- conditioning unit 6 and cooled through sensitive heat cooling, is sent into a garret 44 by a fan 63 through a conduit 64. Air, regulated by an outdoor air regulating device 7 introducing outdoor air through an outdoor air intake 76 and regulating it so as to have optimum temperature and humidity, is supplied into the garret 44 through the conduit 74 by a fan 3. Both of the cooled air and regulated air, which are sent into the garret 44, are mixed with each other and is supplied into a clean room 43 through a clean room module 5. The temperature of air, cooled through sensitive heat cooling, is high in such a manner whereby cooling water, having higher temperature than the same so far, can be used.
TAKAHASHI SHINZO
KATSUYAMA KOICHIRO
NIBU HITOSHI
NAKAGAWA TAKESHI
| JPH0216937U | 1990-02-02 |