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Title:
AIR MICROMACHINING METHOD AND SHEET PROCESSED BY USING THE SAME METHOD
Document Type and Number:
Japanese Patent JPH05285836
Kind Code:
A
Abstract:

PURPOSE: To provide an air micromachining method and a sheet processed by using the method wherein etching just like a complicated etching pattern is applied on a surface to be processed, formation of a vertical hole and execution of groove processing are simplified, and several hundreds etching depth μm can be attained.

CONSTITUTION: The surface to be processed of a work 1 is covered with a mask 2 on which a given pattern is formed. Either the work or an injection nozzle 4 is fixed, and the other of the injection nozzle and the work is swung in the direction of the short side of a rectangular injection nozzle 5. By increasing the size of the rectangular injection nozzle to a value higher than the size of the surface to be processed of the work, a sold gas two-phase flow is injected at a high speed from a position above the mask to apply surface processing on the surface to be processed of the work.


Inventors:
KURODA MASAYUKI
Application Number:
JP9321992A
Publication Date:
November 02, 1993
Filing Date:
April 14, 1992
Export Citation:
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Assignee:
SONY CORP
International Classes:
B24C1/04; B81B1/00; B81C99/00; H01L21/304; (IPC1-7): B24C1/04; H01L21/304
Attorney, Agent or Firm:
Mitsuo Takahashi