Title:
ALIGNER DEVICE AND POSITIONAL DEVIATION CORRECTION METHOD FOR TABULAR WORK-PIECE
Document Type and Number:
Japanese Patent JP2023032305
Kind Code:
A
Abstract:
To provide an aligner device configured to be capable of reducing a time of transfer including processing of positional deviation correction of a tabular work-piece.SOLUTION: An aligner device comprises: a robot hand including a hand body that mounts and holds a work-piece; a work-piece lift mechanism that lifts a work-piece transferred by the robot hand and mounted on the hand body; a sensor 3 that has a downward sensor surface and is disposed so as to be capable of detecting an outer shape of a work-piece made to be close to the sensor surface by the work-piece lift mechanism; positional deviation amount calculation means 6 for calculating amounts of positional deviation in X, Y, and θ directions from a reference position of the work-piece, from the outer shape of the work-piece acquired by the sensor 3; X-Y direction positional deviation amount correction means 81 for correcting the X direction positional deviation amount and the Y direction positional deviation amount of the work-piece on the basis of the amounts of positional deviation in the X-Y directions; and θ direction positional deviation amount correction means 82 for correcting the θ direction positional deviation amount of the work-piece on the basis of the amount of positional deviation in the θ direction.SELECTED DRAWING: Figure 3
Inventors:
OTOGAWA YASUNOBU
OKUDA MASAHITO
SAKAGUCHI YUYA
OKUDA MASAHITO
SAKAGUCHI YUYA
Application Number:
JP2021138352A
Publication Date:
March 09, 2023
Filing Date:
August 26, 2021
Export Citation:
Assignee:
DAIHEN CORP
International Classes:
H01L21/68
Attorney, Agent or Firm:
Usui Nao
Shintaro Suzuki
Shintaro Suzuki
Previous Patent: JPWO2023032304
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