Title:
ALIGNMENT METHOD
Document Type and Number:
Japanese Patent JP3303834
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an alignment method by which alignment can be performed with accuracy, without deteriorating the throughput (productivity) of measurement work.
SOLUTION: In an alignment method, arrangement linear errors of shots and the remaining errors after the arrangement linear error is removed are calculated by using the measured results (S4) of all shots so far performed, whenever the position of an alignment mark of one shot is measured (S5) and the measurement of the position of the alignment mark is terminated, when the remaining errors become lower than predetermined alignment accuracy. After the position of the alignment mark is measured, exposure is performed by using a projection aligner based on the corrected alignment error value of the shots.
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Inventors:
Masashi Fujimoto
Application Number:
JP11457299A
Publication Date:
July 22, 2002
Filing Date:
April 22, 1999
Export Citation:
Assignee:
NEC
International Classes:
H01L21/027; G03F7/20; G03F9/00; (IPC1-7): H01L21/027; G03F7/20; G03F9/00
Domestic Patent References:
| JP897123A | ||||
| JP7226360A | ||||
| JP757996A | ||||
| JP6252027A | ||||
| JP10125576A | ||||
| JP6284516A |
Attorney, Agent or Firm:
Noriaki Miyakoshi
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