PURPOSE: To make highly accurate alignment possible by averaging all of the quantities of deviations by each alignment mark by every area, obtaining the quantity of deviation of each area, and thereby obtaining the quantity of deviation of an object based on the quantities of deviations of all of the areas.
CONSTITUTION: The effective quantities of pattern deviations Δx1 and Δy1 are averaged, and average quantities of deviations Δx1 and Δy1 at each corner are thereby obtained. Next, average quantities of deviations Δx2 and Δy2 at four corners are furthermore averaged, and the quantities of deviations Δx3 and Δy3 of the whole of an object at its center of gravity are thereby computed. Furthermore, the quantity of rotational movement Δθ of the whole of an object is computed based on the average quantities of movements at four corners, so that the correction quantities of movements Δx3, Δy3 and Δz3 of an object are thereby obtained. Subsequently, the object is moved in a X Y Z and θ stage by each quantity of deviation Δx3, Δy3 of the whole of the object based on the correction quantities of movements for the center of gravity, and furthermore the object is rotated by the quantity of rotational movement Δθ of the object, so that the object is thereby aligned at a position as close as possible to a regular designed position.
IJICHI HIROAKI
TAKAGI KEIJI
