Title:
ALTERNATING FIELD SHIELDING FILM AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH1117386
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To effectively shield an alternating field by coating the surface of a transparent substrate with a transparent conductive film comprising indium oxide - tin oxide obtained by crystallizing hydrolytic polymer of the liquid solution containing indium alkoxide and tin alkoxide, to form an alternating field shielding film. SOLUTION: An alternating field shielding film 10a is constituted by a single layer film of only a transparent conductive film 12. The transparent conductive film 12 is formed of indium oxide - tin oxide. To form the transparent conductive film 12 on the surface of a face plate 38, with indium alkoxide and tin alkoxide as starting materials, sol is controlled by hydrolyzing and polymerizing liquid solution containing these alkoxide. The obtained sol is applied to the surface of the face plate 38, to form a gel film on the surface of the face plate 38, and then the gel film is crystallized.
Inventors:
HAYAMA HIDEKAZU
TOKI MOTOYUKI
FUKUI TOSHIMI
TOKI MOTOYUKI
FUKUI TOSHIMI
Application Number:
JP18452297A
Publication Date:
January 22, 1999
Filing Date:
June 24, 1997
Export Citation:
Assignee:
KANSAI SHIN GIJUTSU KENKYUSHO
International Classes:
C23C18/12; H01J9/20; H01J29/88; H01J31/20; H05K9/00; (IPC1-7): H05K9/00; C23C18/12; H01J9/20; H01J29/88; H01J31/20
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