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Title:
ALUMINUM NITRIDE JOINED BODY AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH07101784
Kind Code:
A
Abstract:

PURPOSE: To produce an aluminum nitride joined body having high bonding strength and not causing cracking or breaking even under a sudden heat shock.

CONSTITUTION: An aluminum nitride sintered compact 1 is joined to a metallic member 1' having ≥10×10-6/°C coefft. of linear expansion with copper or copper alloy 2 and layers 3 of a compd. based on titanium nitride formed by a reaction of titanium with nitrogen atoms diffused and migrated from the aluminum nitride sintered compact 1 to produce the objective aluminum nitride joined body. In other way, an aluminum nitride sintered compact is joined to a metallic member made of copper or copper alloy with a layer based on titanium nitride formed by a reaction of titanium with nitrogen atoms diffused and migrated from the aluminum nitride sintered compact to produce the objective aluminum nitride joined body.


Inventors:
TANAKA SHUNICHIRO
IKEDA KAZUO
SAYANO AKIO
Application Number:
JP12350994A
Publication Date:
April 18, 1995
Filing Date:
June 06, 1994
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
C04B37/00; C04B37/02; (IPC1-7): C04B37/00; C04B37/02
Domestic Patent References:
JPS6077178A1985-05-01
JPS62179893A1987-08-07
JPH0474306A1992-03-09
JPS6077177A1985-05-01
JPS6033269A1985-02-20
Attorney, Agent or Firm:
Suyama Saichi