Title:
窒化アルミニウム焼結体及びそれを用いた半導体製造装置用又は検査装置用のウエハ保持体
Document Type and Number:
Japanese Patent JP5857476
Kind Code:
B2
Inventors:
Nishihito
Hirohiko Nakata
Nakanishi Hidenori
Masuhiro Natsuhara
Hirohiko Nakata
Nakanishi Hidenori
Masuhiro Natsuhara
Application Number:
JP2011145450A
Publication Date:
February 10, 2016
Filing Date:
June 30, 2011
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C04B35/581; H01L21/683
Domestic Patent References:
| JP62223070A | ||||
| JP2005041765A | ||||
| JP2006265036A | ||||
| JP2003226580A |
Attorney, Agent or Firm:
Noriyuki Tsujikawa
Masao Yamamoto
Masao Yamamoto
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