PURPOSE: To obtain a stable solution at a high speed in numerical analysis of a semiconductor element.

CONSTITUTION: An analyzer comprises a unit 3 for reading structural information, a unit 4 for creating discrete lattice points in analytic space, a unit 5 for setting attribute and boundary condition for each lattice point, a unit 6 for judging whether the changes such as shape change in adjacent lattice point is too quick, a DC matrix forming unit 7 for linear development and linearization with variables constituting a basic equation for DC steady state, a DC matrix calculation pretreatment unit 8 for performing incomplete LDU analysis as a pretreatment of the matrix calculation of DC matrix, a DC matrix solution unit 9, a DC calculation ending judging unit 10, a unit 11 for creating matrix of AC analysis, an AC matrix calculation pretreatment unit 12 for performing incomplete LDU analysis as pretreatment of matrix calculation of AC matrix, an AC matrix solution unit 13, and a result output unit 14 for outputting the results as required.