Title:
ANGULAR VELOCITY DETECTING DEVICE
Document Type and Number:
Japanese Patent JP3489487
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve detection accuracy in an angular velocity detecting device.
SOLUTION: Vibrators 20 connected by beams 33-1 to 33-4 and main flames 30-1 and 30-2 divided along the Y-axis are provided afloat over a substrate 10. The main flames 30-1 and 30-2 and the vibrators 20 are driven along the X-axis by driving electrode parts 51-1 to 51-4. The vibrators 20 are vibrated along the Y-axis by angular velocity on the Z-axis which intersects both X- and Y-axis at right angles. By measuring the vibration along the Y-axis through the use of a high-frequency signal provided for detecting electrode parts 53-1 to 53-4, the angular velocity is detected. By providing the drive electrodes 51-1 to 51-4 each for the main flames 30-1 and 30-2 divided along the Y-axis and applying independent drive signals, the main flames 30-1 and 30-2 are accurately vibrated along the X-axis.
Inventors:
Masaru Nagao
Application Number:
JP16013599A
Publication Date:
January 19, 2004
Filing Date:
June 07, 1999
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
G01P3/00; G01C19/56; G01C19/5719; G01C19/5726; G01C19/5762; G01C19/5769; (IPC1-7): G01C19/56; G01P9/04
Domestic Patent References:
| JP4102013A | ||||
| JP9236436A | ||||
| JP1047966A | ||||
| JP6123631A | ||||
| JP10170276A |
Other References:
【文献】Kyu-Yeon Park,Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped,Sensors ansd Actuators A,米国,1998年 1月,64,P.69-P.74,springs(タイトル続き)
【文献】Y.S. Oh,A Tunable vibratory microgyroscope,Sensors and Actuators A,米国,1998年 1月,64,P.51-P.56
【文献】Cimoo Song,Commercial Vision of Silicon Based Internal Sensors,Transducers’ 97,米国,1997年 6月,P.839-P.842
【文献】Y.S. Oh,A Tunable vibratory microgyroscope,Sensors and Actuators A,米国,1998年 1月,64,P.51-P.56
【文献】Cimoo Song,Commercial Vision of Silicon Based Internal Sensors,Transducers’ 97,米国,1997年 6月,P.839-P.842
Attorney, Agent or Firm:
Sakio Ohba
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