Title:
帯電防止剤、帯電防止膜及び帯電防止膜被覆物品
Document Type and Number:
Japanese Patent JP4293567
Kind Code:
B2
Abstract:
The object of the invention is to provide an antistatic agent exhibiting an excellent property of preventing film-thinning phenomenon and fogging in chemically amplified resists, an antistatic film using the antistatic agent and a product coated therewith.
The antistatic agent comprises a water-soluble electroconductive polymer, a solvent and a specific water-soluble polymer. By using this water-soluble polymer in combination with a water-soluble electroconductive polymer in an antistatic agent, influences on resist (such as fogging, film-thinning phenomenons and dissolution of resist after developing of resist) can be suppressed even when surfactant is added into the antistatic agent for the purpose of imparting coatability inexpensively and easily, while maintaining coatability of the agent. An antistatic agent having improved coatability by comprising surfactant may cause mixing, which leads to development defects and changes in the developing time, not only in chemically amplified resist but also in non-chemically amplified resist used for microfabrication.
Inventors:
Nishioka Ayako
Takashi Okubo
Takashi Okubo
Application Number:
JP2008278238A
Publication Date:
July 08, 2009
Filing Date:
October 29, 2008
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
C09K3/16; C09D5/00; C09D139/04; C09D181/00; C09D185/00; G03F7/11; H01L21/027
Domestic Patent References:
| JP2002226721A | ||||
| JP2004189784A | ||||
| JP11189746A | ||||
| JP7041756A | ||||
| JP7048436A |
Foreign References:
| WO2005113678A1 |
Attorney, Agent or Firm:
Kunihisa Landlord
Atsushi Hayashi
Atsushi Hayashi