Title:
APPARATUS FOR DETECTING CENTRAL POSITION OF WAFER
Document Type and Number:
Japanese Patent JPH04295704
Kind Code:
A
Abstract:
PURPOSE:To shorten the time when the central position of a wafer is detected, to achieve the compact configuration of an apparatus and to eliminate the directivity in the detection. CONSTITUTION:A linear image sensor 15 is provided on the halfway of conveying path of a wafer 3 which is conveyed with a wafer conveying device 13. A wafer-center-position operator 16 obtains the maximum detecting length and the deviation from a reference position at the maximum detecting length based on the picked-up image from the linear image sensor and operates the central position of the wafer. There parts 15 and 16 are provided. The central position of the wafer can be immediately detected only by passing the wafer with respect to the linear image sensor.
More Like This:
Inventors:
KANAZAWA GENICHI
Application Number:
JP8468691A
Publication Date:
October 20, 1992
Filing Date:
March 25, 1991
Export Citation:
Assignee:
KOKUSAI ELECTRIC CO LTD
International Classes:
G01B11/00; H01L21/68; (IPC1-7): G01B11/00; H01L21/68
Attorney, Agent or Firm:
Miyoshi Shoji