Title:
APPARATUS FOR FORMING HIGH-HARDNESS FILM ON METAL SURFACES
Document Type and Number:
Japanese Patent JPS51136584
Kind Code:
A
Abstract:
PURPOSE: An apparatus for forming a high-hardness film such as TiC, TiN on an article at a temperature of 500°C or under without degrading the hardness and mechanical strength of that material.
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Inventors:
KAWASHITA YASUSHI
NAKASONE MASAMI
SUZUKI AKIRA
SASAI YASUHIRO
NAKASONE MASAMI
SUZUKI AKIRA
SASAI YASUHIRO
Application Number:
JP6137775A
Publication Date:
November 26, 1976
Filing Date:
May 21, 1975
Export Citation:
Assignee:
SHINKO SEIKI
International Classes:
C23C14/32; C23C14/00; C23C14/06; C23C14/24; (IPC1-7): C23C13/00; C23C13/08