Title:
APPARATUS AND METHOD FOR DETECTING CRACKED WORK
Document Type and Number:
Japanese Patent JP3254115
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make it possible to easily and accurately confirm the rack of a work by providing detecting means for detecting the cracked work from many laminated work group.
SOLUTION: The axes of supporting bars 35 to 37 are directed in a horizontal direction in the state that a special purpose jig 30 is dipped in a liquid tank 43. An ultrasonic wave generator 45 is turned on in this state, and a liquid flow is generated in the liquid in the tank 43. A work W supported by the bars 35, 37 is rotated and rocked between the bars 35, 37 and plates 31, 32 by the flow. At this time, the cracked work W is deviated with respect to the bars 35, 37, or placed out of the bars 35, 37. Thus, the crack of the work W of the many laminated work group W) cut by a wire saw can be simultaneously confirmed.
Inventors:
Miyazaki Takeshirou
Teiichi Tsubata
Akio Kawakita
Teiichi Tsubata
Akio Kawakita
Application Number:
JP23558195A
Publication Date:
February 04, 2002
Filing Date:
September 13, 1995
Export Citation:
Assignee:
Hihei Toyama Co., Ltd.
International Classes:
B24B55/12; B24B27/06; B28D5/00; B28D7/00; H01L21/66; (IPC1-7): B28D7/00; H01L21/66
Domestic Patent References:
| JP61263135A | ||||
| JP5198645A | ||||
| JP61182761A |
Attorney, Agent or Firm:
Hironobu Onda