Title:
APPARATUS AND METHOD FOR DICING
Document Type and Number:
Japanese Patent JP2002176012
Kind Code:
A
Abstract:
To provide a dicing apparatus improved to a detect a wear state of a dicing blade.
The dicing apparatus comprises the dicing blade 2, a first light source 1a for illuminating light to one surface of the blade 2, and a first piece wear detecting means 1 having a first photodetector 1b for photodetecting the light reflected from the one surface of the blade 2. The detecting means 1 can move radially of the blade 2.
Inventors:
KOJO KATSUTOSHI
Application Number:
JP2000369496A
Publication Date:
June 21, 2002
Filing Date:
December 05, 2000
Export Citation:
Assignee:
SHARP KK
International Classes:
B23Q17/20; H01L21/301; (IPC1-7): H01L21/301; B23Q17/20
Attorney, Agent or Firm:
Fukami Hisaro