Title:
APPARATUS, METHOD, AND SYSTEM FOR ULTRASONIC WASHING
Document Type and Number:
Japanese Patent JP2004235366
Kind Code:
A
Abstract:
To efficiently and securely perform ultrasonic washing of various objects to be washed even with a relatively small-sized vibrator.
A washing tank 100 and a vibrator 101 are provided. The vibrator is installed on the side of the bottom surface of the washing tank 100 and vibrates washing liquid 150, and the vibrator 101 is moved on the bottom surface 110 of the washing tank 100. Further, a vibrator is provided above an object to be washed which is dipped in the washing liquid 150 and vibrates the washing liquid 150. Consequently, uneven washing is prevented from being generated between the upper part and lower part of the object to be washed.
Inventors:
MIZUNO TORU
KIN KYOBAI
KIN KYOBAI
Application Number:
JP2003021134A
Publication Date:
August 19, 2004
Filing Date:
January 29, 2003
Export Citation:
Assignee:
ATOKKU KK
SHINETSU QUARTZ PROD
SHINETSU QUARTZ PROD
International Classes:
B08B3/12; B06B1/06; C23G3/00; H01L21/304; (IPC1-7): H01L21/304; B08B3/12; C23G3/00
Attorney, Agent or Firm:
Akinori Sakai
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