To provide a technology which can aim at the reduction of air-conditioning kinetic energy in the case of conveying while keeping the atmosphere of the ambients of a substrate pure.
A conveyance course is constituted along the arrangement position of a plurality of processors 10 which perform a predetermined treatment to the substrate W, and a conveyor 30 which delivers the substrate W and carries out intermittent conveyance in preparation position P1 corresponding to respective processors 10. On the conveyor 30, a substrate storing container 50 which contains the substrate W is airtightly freely attachably and detachably mounted, and in the state that the substrate W is contained to the substrate storing container 50, it conveys in the receiving and delivering preparation position P2.
NAKAJIMA TOSHIKI
Kiyoshi Yasushima
Souji Sasaki
Noboru Omura
Takanashi Norio