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Patent Searching and Data


Title:
APPARATUS FOR PRODUCING MAGNETIC RECORDING MEDIUM
Document Type and Number:
Japanese Patent JPH01287822
Kind Code:
A
Abstract:

PURPOSE: To form the magnetic recording medium for perpendicular magnetic recording uniformly over a wide area at a high speed by forming a perpendicularly magnetized film by high-speed electron beam vapor deposition at a specific rate and constituting a vessel for housing a material for vapor deposition of ZrO2 or SiO2.

CONSTITUTION: Heating of the material 1 for vapor deposition is executed by the accelerated electron beam and the vapor deposition is executed under a high-speed condition of ≥2,000(/sec) vapor deposition rate. The vessel 6 for housing the material for vapor deposition is preferably the vessel consisting of the ZrO2 or SiO2 or the water-cooled copper vessel lined with said materials. The Zr and Si do not particularly degrade the characteristics of the perpendicularly magnetized film even if there is the contamination from the vessel material 6 in the perpendicularly magnetized film consisting of a Co alloy and, therefore, the magnetic recording medium for perpendicular magnetic recording having the performance uniform over the large area and above all, the uniform C/N is obtd.


Inventors:
SHINOHARA KOICHI
Application Number:
JP11729088A
Publication Date:
November 20, 1989
Filing Date:
May 13, 1988
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C14/24; G11B5/85; (IPC1-7): C23C14/24; G11B5/85
Attorney, Agent or Firm:
Akira Kobiji (2 outside)