Title:
APPARATUS FOR PRODUCING SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS6063996
Kind Code:
A
Inventors:
TAMAKI KIYOUHEI
Application Number:
JP17061283A
Publication Date:
April 12, 1985
Filing Date:
September 17, 1983
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/50; H05K13/02; (IPC1-7): H05K13/02
Attorney, Agent or Firm:
Aoki Akira
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