Title:
APPARATUS FOR PULLING UP SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPS5930795
Kind Code:
A
Abstract:
PURPOSE:To grow stably a single crystal by the Czochralski method, by placing a vertically movable auxiliary heater above a melt as a starting material in a crucible so as to regulate the temp. of the space around a growing single crystal. CONSTITUTION:A vertically movable auxiliary heater 8 is placed at the outside of an after-heater 6 or a heat insulating material 7 installed above a melt 3 as a starting material. The heater 8 is moved in the longitudinal direction of a support 10 with a gear box 11 for vertical movement through an arm 9. The heater 8 heats the space on the melt 3, chiefly a growing single crystal 5. When a high-frequency heating system is applied, a cylindrical electric conductor of platinum or the like is used as the heater 8. A single crystal having uniformity and high quality all over the length can be pulled up by placing the heater 8.
Inventors:
TATSUMI MASAMI
TADA KOUJI
KUHARA MIKI
TADA KOUJI
KUHARA MIKI
Application Number:
JP13958482A
Publication Date:
February 18, 1984
Filing Date:
August 10, 1982
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C30B15/14; H01L21/208; (IPC1-7): H01L21/02
Attorney, Agent or Firm:
Hideki Aoki