Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
APPARATUS FOR WASHING SURFACE OF SOLID
Document Type and Number:
Japanese Patent JPH04215880
Kind Code:
A
Abstract:

PURPOSE: To uniformly wash the entire surface of a part having a complicated structure all over by forming the turbulent flow of a washing solution prepared by mixing insoluble particles with a liquid.

CONSTITUTION: A part 3 to be washed having a complicated surface shape is immersed in a washing tank 2 having a washing solution 1 containing fine particles 6 received therein. A washing tank 2 is equipped with a stirring device 5 and, by controlling the rotational speed and rotary direction of the stirring device and the angle of the stirring device to the part 3 to be washed, turbulent flow can be generated in the washing solution of the tank 2. By this mechanism, the fine particles in the washing solution 1 are moved in a turbulent state along with the flow of the washing solution to collide with the surface of the part 3 to be washed and the contaminant 7 adhered to the surface of the part 3 to be washed is peeled off to be taken in the washing solution to be removed. Further, the fine particles 6 also uniformly collide with the surface of the hole 8 of the part 3 to be washed to make it possible to wash the entire surface of the part 3 to be washed. By this method contaminant 7 strongly adhered to the part 3 to be washed having a complicated shape and structure can be efficiently washed off and removed.


Inventors:
HAMANO MEGUMI
OTAKE MITSUYOSHI
WATANABE MASAHIRO
TAKIZAWA YOSHIHARU
Application Number:
JP3983491A
Publication Date:
August 06, 1992
Filing Date:
March 06, 1991
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HITACHI LTD
International Classes:
B08B3/10; B08B3/06; B08B7/02; B24B31/00; H01L21/304; H05K3/26; (IPC1-7): B08B3/10; H01L21/304; H05K3/26
Attorney, Agent or Firm:
Yasuo Sakuta