Title:
アーク検出装置、および、高周波電源装置
Document Type and Number:
Japanese Patent JP7293536
Kind Code:
B2
Abstract:
To provide an arc detection device capable of highly accurately detecting the generation of a soft arc in a plasma processing system.SOLUTION: There is provided an arc detection part 17 in a high frequency power supply device 1 that supplies high frequency power to a plasma processing device 4. The arc detection part 17 is configured to include: a phase angle calculation part 23 calculating a phase angle of a reflection coefficient which is information on reflection coefficients; a standard deviation calculation part 24 calculating a standard deviation of phase angles calculated by the phase angle calculation part 23; and an arc determination part 25 determining whether or not an arc is generated, based on the standard deviation calculated by the standard deviation calculation part 24. The arc determination part 25 determines that the arc is generated, if the number of times of partial soft arcs generated during a time until a predetermined monitoring time elapses after the standard deviation is equal to or more than a predetermined monitoring start threshold is equal to or more than a predetermined number of times of determination. Thus, the generation of a soft arc can be detected with high accuracy.SELECTED DRAWING: Figure 1
Inventors:
Yasuyuki Ogami
Application Number:
JP2019234490A
Publication Date:
June 20, 2023
Filing Date:
December 25, 2019
Export Citation:
Assignee:
Daihen Co., Ltd.
International Classes:
H05H1/00; C23C16/50; H01L21/3065; H05H1/46
Domestic Patent References:
| JP2006140440A | ||||
| JP2007149596A | ||||
| JP2007214254A | ||||
| JP2014056825A | ||||
| JP2016170897A |
Foreign References:
| US20190139746 |
Attorney, Agent or Firm:
Minoru Yoshida
Keita Kobuchi
Keita Kobuchi