PURPOSE: To enhance the quality control of treatment process, by magnetically floating up an article such as, for example, a semiconductor element, etc. in a vacuum conveyance space so that the article is magnetically moved thereby a sliding part may be eliminated.

CONSTITUTION: A conveying device which is preferably disposed in an apparatus for manufacturing semiconductors under the atmosphere of high-vacuum, includes a nonmagnetic material conveying pipe 5 which defines therein a conveying space 4 in a high vacuum condition, and drive magnets 16 are laid on the lower surface of the conveying pipe 5 along the longitudinal direction thereof with floating permanent magnets 17, 18 being laid on both sides of the magnets 16 in parallel therewith. Further, in the conveying pipe 5 there is disposed a sled-like carrier case 20 made of nonmagnetic materials, for holding and moving articles 19 to be conveyed, such as, for example, semiconductor wafers, etc. This conveying case 20 is provided on its lower surface with a ferromagnetic material armature 21 cooperating with the above-mentioned magnets 16 through 18 and floating permanent magnets 22, 23.