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Title:
ATTITUDE CONTROL DEVICE FOR PASSIVE TYPE AIR VIBRATION CONTROL TABLE
Document Type and Number:
Japanese Patent JP3062547
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To detect displacement and the angle change of a bench due to oscillation as vibration control performance with the sir spring of a bench for mounting an appliance for a passive type air vibration control base held as it is, to rapidly position a bench in a given position by eliminating the resonance point of the air spring without exerting wide deformation on the air spring of a vibration control device, and to reduce a nonsensitive zone by the air spring as much as possible.
SOLUTION: In a passive type air vibration control base to effect support of a bench 3 for mounting an appliance as vibration from a floor is insulated by a plurality of air springs 4 arranged at the upper end of a frame 2, a plurality of gap sensors 5 to sense and detect the change of the position and the angle of the bench 3 are arranged on the frame 2. A controller 7 is provided to decide it by an output from the sensor 5 which actuator 6 is moved and by which distance the actuator is moved and output a result. By the output of this controller 7, the actuators 6 to move the bench 3 such that the bench 3 is always held in a given position are respectively arranged by the side of the respective sensors 5.


Inventors:
Berede Wu Jin
Application Number:
JP29959197A
Publication Date:
July 10, 2000
Filing Date:
October 17, 1997
Export Citation:
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Assignee:
Development Bank of Japan
The Bank of Yokohama, Ltd.
International Classes:
F16F15/02; G05D19/02; (IPC1-7): F16F15/02; G05D19/02
Domestic Patent References:
JP6307494A
JP5202981A
JP3213745A
Attorney, Agent or Firm:
Noriaki Fujisawa (1 outside)