Title:
AUTOMATIC MEASURING UNIT
Document Type and Number:
Japanese Patent JPS5448486
Kind Code:
A
Abstract:
PURPOSE:To avoid the damage to the measuring needle, by performing accurate measurement, through contacting the measuring needle to the measured object with a given amount of contactness even if there is bend and waving on the measured material, by automatically adjusting the upper and lower amount of shift of the upper and lower set along the surface shape of the measured material. CONSTITUTION:The probe card 13 is constituted with 16 pairs of measuring needle 11 and the position detecting needle 12. At this tmie, the measuring needles 11 and 12 are placed with the tips close each other, and the detection needle 12 is projected slightly lower than the measuring needle 11. The switch function is given to the detection needle 12 and constitution is made that electric signal is outputted when this is in contact with the measured material. Next, the card 13 is mounted under the up and lower set 3 placed on the measring main body, and the detection needle 12 is cntacted with the measured material 1 placed on the fine feed set 2. After that, the output information from the needle 12 lowers the set 3 further, and the measuring needle 11 is contacted with the measured material 1 and measurement is made.
Inventors:
MATSUMURA RIYUUKICHI
TANAKA KAZUMI
TOMIOKA TATSUYUKI
TANAKA KAZUMI
TOMIOKA TATSUYUKI
Application Number:
JP11577977A
Publication Date:
April 17, 1979
Filing Date:
September 26, 1977
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01R1/073; G01B5/00; G01R27/02; H01C17/00; H01L21/66; (IPC1-7): G01B5/00; G01R27/02; H01C17/00; H01L21/66
Domestic Patent References:
| JPS4845179A | 1973-06-28 | |||
| JPS5178692A | 1976-07-08 |