Title:
ビーム走査装置およびパターン描画装置
Document Type and Number:
Japanese Patent JP7056572
Kind Code:
B2
Abstract:
A rendering unit (Un) is provided with an fθ lens system (FT) on which a processing beam (LBn) deflected by a reflection plane (RP) of an angle-variable polygon mirror (PM) is incident and which has refractive power by which the processing beam (LBn) is concentrated as spot light (SP) onto a substrate P, and the rendering unit scans the spot light (SP) at a scanning speed corresponding to an angular change of the reflection plane (RP) of the polygon mirror (PM). The rendering unit (Un) is provided with an photoelectric conversion element (DTo) which receives a reflected beam (Bgb) of an origin detection laser beam (Bga) projected toward the reflection plane (RP) of the polygon mirror (PM), and outputs an origin signal (SZn) indicating a point of time at which the reflection plane (RP) of the polygon mirror (PM) is located at a predetermined angle, and a lens system (GLb) which has refractive power set smaller than the refractive power of the fθ lens system (FT), and concentrates the reflected beam (Bgb) as spot light (SPr) onto the photoelectric conversion element (DTo).
Inventors:
Masaki Kato
Yoshiaki Kito
Yoshiaki Kito
Application Number:
JP2018542038A
Publication Date:
April 19, 2022
Filing Date:
September 04, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B26/10; G02B26/12
Domestic Patent References:
| JP59011083B2 | ||||
| JP2008304529A | ||||
| JP8110488A | ||||
| JP59011082B2 | ||||
| JP10239609A | ||||
| JP2001142019A | ||||
| JP2005275399A | ||||
| JP2016153893A | ||||
| JP2006276805A |
Foreign References:
| WO2015166910A1 |
Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Takayuki Chima
Yasuharu Nakasone
Shiro Sakai
Tosuke Sekiguchi
Toshiyuki Miyadera
Takayuki Chima
Yasuharu Nakasone
Shiro Sakai
Tosuke Sekiguchi