Title:
基板保持装置
Document Type and Number:
Japanese Patent JP6562508
Kind Code:
B2
Inventors:
Yutaka Kama
Nakai Hitoshi
Nakai Hitoshi
Application Number:
JP2015189835A
Publication Date:
August 21, 2019
Filing Date:
September 28, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/683; H01L21/027; H01L21/304
Domestic Patent References:
| JP2007105617A | ||||
| JP2007335826A | ||||
| JP2013514652A | ||||
| JP60030140A | ||||
| JP6037082A | ||||
| JP5090238A | ||||
| JP2004119782A | ||||
| JP2015026792A |
Foreign References:
| WO2011001767A1 | ||||
| US20130127102 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Masahide Yasuda
Mio Kawasaki
Masahide Yasuda