Title:
座屈型アクチュエータ
Document Type and Number:
Japanese Patent JP4178327
Kind Code:
B2
Abstract:
In order to improve the reliability, a connecting section of a supporting beam is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of switch positions. A substrate 2, stationary members 6, rotatable supporters 8, and supporting beams 7 support a movable member 4 in a shiftable manner in a y-axis direction, such that the movable member 4 can be shifted between first and second switch positions. Moreover, the rotatable supporters 8 are each provided with arm portions 9, 10, and 11 which extend in a radial fashion and support the corresponding supporting beam 7 in a rotatable manner. When the movable member 4 is being shifted, each supporting beam 7 can be rotated without having to bend a corresponding end 7A by a significant amount. Thus, a large barrier DELTA E of potential energy of the movable member 4 is set between the first and second switch positions. The movable member 4 can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes 12 to 15. Furthermore, each arm portion 10 prevents the movable member 4 from being displaced in an x-axis direction.
Inventors:
Masaya Tamura
Shinji Kobayashi
Shinji Kobayashi
Application Number:
JP2005512904A
Publication Date:
November 12, 2008
Filing Date:
June 25, 2004
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
B81B3/00; G02B6/35; G02B26/08; H02N1/00
Domestic Patent References:
| JP200425437A |
Foreign References:
| US6303885 |
Attorney, Agent or Firm:
Kazuhiko Hirose