To solve problems in a conventional capacitor manufacturing method for manufacturing a capacitor by use of photolithography technique wherein etching and deposition must be repeated in each process, thereby making manufacturing processes complicated, and masks must be manufactured per processes of etching and deposition, thereby increasing cost.
An insulation material is machined by electrolytic discharge machining using an electrode for machining. After manufacturing a structure of the capacitor, conductive material is deposited on the insulation material, and a capacitor electrode material and wiring are electrochemically manufactured using the same electrode for machining thereon. After this, unnecessary conductive material is removed to manufacture the capacitor.
| JPS5877412 | PROCESSING DEVICE |
| JPS578035 | WIRE CUTTING TYPE ELECTROSPARK MACHINING METHOD |
SUDA MASAYUKI
SHINOHARA JUN
FURUTA KAZUYOSHI
