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Patent Searching and Data


Title:
CARRIER FOR DISK-SHAPED ARTICLE AND AUTOMATIC CONVEYING APPARATUS USING SAME
Document Type and Number:
Japanese Patent JPH06326182
Kind Code:
A
Abstract:

PURPOSE: To prevent the occurrence of wafer chipping or cracks caused by abnormal vibration when a material to be contained is a wafer by providing pushing members, which are made to abut on each contained disk-shaped article and fix the article, in the vicinity of the input/output opening part of a carrier.

CONSTITUTION: A carrier 1A for containing a wafer S contains a plurality of disk-shaped articles having the same diameter as a carrier main body 2 having an opening part 7, through which the wafer S can be inputted and outputted. Under the contained state, pushing members 13 and 14, which are made to abut on each contained wafer S and fix the wafer, are provided in the vicinity of the opening part 7 of the carrier 1A. The clocking mechanisms of the pushing members 13 and 14 are assembled into the carrier main body 2. Therefore, in the containing carrier 1A and the automatic conveying apparatus using this carrier, a plurality of the wafers can be securely fixed in the carrier S. Thus, the turning and the falling of the carrier 1A, which tend to occur during the vibration in movement of the carrier 1A and at the time of working can be prevented.


Inventors:
YAMAMOTO TAKUYA
Application Number:
JP11332893A
Publication Date:
November 25, 1994
Filing Date:
May 14, 1993
Export Citation:
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Assignee:
SONY CORP
International Classes:
B65D83/00; B65D85/00; B65D85/38; B65D85/86; H01L21/673; H01L21/68; (IPC1-7): H01L21/68; B65D83/00; B65D85/00; B65D85/38
Attorney, Agent or Firm:
Mitsuo Takahashi