Title:
CARRYING APPARATUS, PROCESSING APPARATUS AND CARRYING METHOD
Document Type and Number:
Japanese Patent JP3962705
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To highly accurately carry a cassette by performing spacing at the time of carrying the cassette, facilitating adjusting with less driving constituents thereof, and further enabling easily recognizing a grasping state or a positional relation of the flange of a cassette at the time of carrying the cassette.
SOLUTION: In the carrying apparatus 7 in which an arm 23 grasps a flange 19 provided on the top surface of an object 3 to be carried and carry the object 3, a plurality of sensors 0 are provided on the arm section 23, and the sensors recognize the presence or absence of the flange portion 19 in the arm 23 and a holding state. This arm section 23 is formed to be a cross section of U shape, optical sensors are provided on both ends of a side surface of the arm 23, and an optical sensor is provided on the center portion of the side surface thereof so that these optical sensors recognize the presence or absence of the flange 19 and the holding state.
Inventors:
Shinya Mochizuki
Application Number:
JP2003160630A
Publication Date:
August 22, 2007
Filing Date:
June 05, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B65G49/07; H01L21/677; H01L21/673; H01L21/68; (IPC1-7): H01L21/68; B65G49/07
Domestic Patent References:
| JP1125548U | ||||
| JP4107843A | ||||
| JP2002246432A | ||||
| JP11214476A | ||||
| JP2002076089A | ||||
| JP2001509465A | ||||
| JP11195694A | ||||
| JP2001298069A | ||||
| JP2003017553A |
Attorney, Agent or Firm:
Tetsuo Kobayashi
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