Title:
CASSETTE MOUNTING STAGE AND FIXTURE FOR THE CASSETTE MOUNTING STAGE
Document Type and Number:
Japanese Patent JP2023018558
Kind Code:
A
Abstract:
To enable a mounting of a cassette at a correct position even by an unskilled operator.SOLUTION: In a cassette mounting stage 40, a cassette having a cassette main body which can house a plurality of workpieces in an inner part, and three or more leg parts 32 formed under a lower end of the cassette main body is mounted. In each leg part 32 of the cassette, a notch 39 containing an inclination surface 391 in which an area of a horizontal cross section is gradually expanded from an upper side to a lower side is formed. The cassette mounting stage 40 comprises: an upper surface 51 of a cassette elevator 50; and three or more engagement parts 44 corresponded to each leg part 32 of the cassette mounted onto the upper surface 51. Each engagement part 44 includes an inclination surface 461 along the inclination surface 391 which is expanded to each leg part 32 of the cassette, and includes a convex part 46 of which the area of the horizontal cross section is gradually increased from the upper side to the lower side. A direction of at least two convex parts 46 of the three or more engagement parts 44 is arranged in non-parallel.SELECTED DRAWING: Figure 5
Inventors:
WONG WAI SAM
Application Number:
JP2021122771A
Publication Date:
February 08, 2023
Filing Date:
July 27, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/683; B23Q7/12; B24B41/06; B24B49/10; H01L21/673
Attorney, Agent or Firm:
Sakai International Patent Office
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