To provide a cassette storing equipment which can temporarily store carrier cassettes in a substrate cleaning system without having to increase the size of the system itself by building a cassette storing space three- dimensionally.
The cassette storing equipment comprises a three dimensional cassette stocker 2 in which a plurality of cassette placement section 5 for placing the carrier cassettes 1 is disposed in a plurality of stages in the up and down direction and a transfer robot 3 for transferring the carrier cassettes 1 to the cassettes placement sections 5 of the cassette stocker 2. With this structure, a three dimensional and apace saving cassette storing space can be secured inside the substrate cleaning system, making the necessary space outside the system as small as possible.
ISOBE NAOTO
IIDA YASUYOSHI
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