Title:
CERAMIC BASE PLATE FOR DEVICE FOR PRODUCING OR INSPECTING SEMICONDUCTOR
Document Type and Number:
Japanese Patent JP3228924
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To suppress lowering of the volume resistivity by maintaining inherent characteristics against temperature rising and falling.
SOLUTION: A ceramic base plate is made of a nitride ceramic containing silicon.
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Inventors:
Takeo Niwa
Application Number:
JP2000017857A
Publication Date:
November 12, 2001
Filing Date:
January 21, 2000
Export Citation:
Assignee:
IBIDEN Co., Ltd.
International Classes:
C04B35/581; C04B35/58; C04B41/51; C04B41/88; H01L21/324; H01L21/66; H01L21/683; H05B3/10; H05K1/03; (IPC1-7): H05B3/10; C04B35/58; C04B35/581; H01L21/324
Domestic Patent References:
| JP948669A |
Attorney, Agent or Firm:
Yasuo Yasutomi