Title:
CERAMIC ETCHING PROCESS
Document Type and Number:
Japanese Patent JPS6081078
Kind Code:
A
Inventors:
KOYAMA TETSUO
SUWA MASATERU
NAKAGAWA YUUSAKU
ASAI OSAMU
SUWA MASATERU
NAKAGAWA YUUSAKU
ASAI OSAMU
Application Number:
JP18703483A
Publication Date:
May 09, 1985
Filing Date:
October 07, 1983
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C04B41/91; (IPC1-7): C04B41/91
Attorney, Agent or Firm:
Katsuo Ogawa