Title:
荷電粒子線装置および帯電評価方法
Document Type and Number:
Japanese Patent JP7351812
Kind Code:
B2
Abstract:
To automatically extract an artifact of a charged particle beam image and enable adjustment of an imaging condition so as to suppress the influence of charging.SOLUTION: A charged particle beam device comprises: a base image storage unit 202 which stores a base image di(1≤i≤m) extracted from a teacher image of an observation sample or a sample being a material that generates the charging equivalent to the observation sample; and a region of interest extraction unit 213 which divides a charged particle beam image generated on the basis of a detection signal from a detector being the observation image into a plurality of division images (S802), and extracts a coordinate position of the division image of the observation image in which a coefficient wL of a labeling base image dL labeled such that the use rate has the strongest correlation with the generation of charging in the observation sample exceeds a prescribed threshold in the base image di as a region of interest of the observation image in a case where the division image is expressed as the total sum of the product of the base image di and the coefficient wi.SELECTED DRAWING: Figure 8
Inventors:
Tianhai Forest
Akika Kurata
Akika Kurata
Application Number:
JP2020126178A
Publication Date:
September 27, 2023
Filing Date:
July 27, 2020
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/22; G06T7/174; H01J37/28
Domestic Patent References:
| JP2018163524A | ||||
| JP2010205864A | ||||
| JP2010140184A | ||||
| JP2007208202A |
Foreign References:
| US20190043688 | ||||
| WO2015064671A1 |
Attorney, Agent or Firm:
Polaire Patent Attorneys Corporation