荷電粒子線装置及び設定支援方法

Title:

荷電粒子線装置及び設定支援方法

Document Type and Number:

Japanese Patent JP7127089

Kind Code:

B2

Abstract:

A GUI (graphical user interface) image (82) includes an input portion (84) and a reference image (86). The reference image (86) includes a plan diagram (87) and numerical value information (88). The plan diagram (87) includes a figure (104) indicating an electron penetration range, a figure (106) indicating a characteristic X-ray generation range, and a figure (108) indicating a back-scattered electron generation range. The numerical value information (88) includes numerical values (110, 112, 114) indicating sizes of these ranges.

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Inventors:

Kazuki Watanabe

Application Number:

JP2020124585A

Publication Date:

August 29, 2022

Filing Date:

July 21, 2020

Export Citation:

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Assignee:

JEOL Ltd.

International Classes:

H01J37/22; H01J37/28

Domestic Patent References:

JP60100038A
JP1035838A
JP2031146A
JP3165437A
JP11185689A
JP2002062270A
JP2003197143A

Foreign References:

WO2016016927A1

Attorney, Agent or Firm:

Patent Corporation yki International Patent Office

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