Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2015149203
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To resolve a problem that, in a charged particle beam device configured to switch any one or more of a beam current, a half-open angle, and a convergence position on a sample surface of a beam by changing the intensity of a convergence action of an electromagnetic lens, imaging cannot be performed while switching the beam current, the half-open angle, and the convergence position of a sample surface of a beam at high speed.SOLUTION: A charged particle beam device comprises: a charged particle beam source irradiating a sample with a charged particle beam; an electromagnetic lens; a lens control power supply for controlling the intensity of a convergence action of the electromagnetic lens; and a phase compensation circuit connected with the lens control power supply in parallel with the electromagnetic lens, and controlling a lens current at switching of the intensity of the convergence action of the electromagnetic lens so as to be monotonously increased or monotonously decreased.
Inventors:
MORITA KENICHI
TANIMOTO AKIYOSHI
SAKAKIBARA SHIN
FUKUDA MUNEYUKI
SUZUKI NAOMASA
OBARA KENJI
TANIMOTO AKIYOSHI
SAKAKIBARA SHIN
FUKUDA MUNEYUKI
SUZUKI NAOMASA
OBARA KENJI
Application Number:
JP2014021837A
Publication Date:
August 20, 2015
Filing Date:
February 07, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/141
Domestic Patent References:
| JPS4919014B1 | 1974-05-14 | |||
| JPS4919014B1 | 1974-05-14 | |||
| JP2005166614A | 2005-06-23 | |||
| JPH02148548A | 1990-06-07 | |||
| JP2005166614A | 2005-06-23 | |||
| JPH02148548A | 1990-06-07 | |||
| JP2005166614A | 2005-06-23 | |||
| JPH02148548A | 1990-06-07 |
Foreign References:
| US20080310704A1 | 2008-12-18 | |||
| US20080310704A1 | 2008-12-18 | |||
| US20080310704A1 | 2008-12-18 |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki