Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2016139456
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a charged particle beam device that implements both high efficient detection of secondary charged particles and suppression of the cause of degrading the resolution occurring when a beam is inclined.SOLUTION: In a charged particle beam device containing an objective lens (14) for converging a charged particle beam, a first deflector (12) for deflecting the charged particle beam so that the charged particle beam is applied to a sample in a direction different from an ideal optical axis of the objective lens, and a second deflector (22) for deflecting charged particles discharged from the sample, a charged particle convergence lens (21) for converging the charged particles discharged from the sample is disposed between the sample and the second deflector, and the strength of the objective lens and the charged particle convergence lens is controlled according to the deflection condition of the first deflector.SELECTED DRAWING: Figure 1
Inventors:
DOI HIDETO
IKEGAMI AKIRA
KAZUMI HIDEYUKI
IKEGAMI AKIRA
KAZUMI HIDEYUKI
Application Number:
JP2015011931A
Publication Date:
August 04, 2016
Filing Date:
January 26, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/28; H01J37/05; H01J37/147; H01J37/153
Domestic Patent References:
| JP2000348658A | 2000-12-15 |
Foreign References:
| WO2010082489A1 | 2010-07-22 |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki
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