Title:
荷電粒子ビーム照射システム及び荷電粒子ビーム出射方法
Document Type and Number:
Japanese Patent JP5245193
Kind Code:
B2
Abstract:
A charged particle beam irradiation system includes an accelerator for accelerating a charged particle beam, a beam irradiation apparatus having a beam energy modulator and arranged for irradiating an object with the charged particle beam extracted from the accelerator and having passed the beam energy modulator, which is rotated and whose thickness in the axial direction differs in the rotational direction, and a controller for controlling the extraction intensity of the charged particle beam extracted from the accelerator, while the charged particle beam is being extracted, on the basis of the rotational angle of the beam energy modulator.
Inventors:
Toshitaka Fujimaki
Satoshi Totake
Satoshi Totake
Application Number:
JP2005258651A
Publication Date:
July 24, 2013
Filing Date:
September 07, 2005
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G21K3/00; A23L3/26; A61N5/10; G21K5/04
Domestic Patent References:
| JP11000408A | ||||
| JP8213200A | ||||
| JP2001194499A | ||||
| JP2000331799A | ||||
| JP2005168695A | ||||
| JP2003086400A | ||||
| JP2005080945A | ||||
| JP2004223144A | ||||
| JP10247600A | ||||
| JP11233300A | ||||
| JP5198397A | ||||
| JP2005062094A |
Attorney, Agent or Firm:
Manabu Inoue