Title:
有機膜の化学的機械的研磨方法および半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4202826
Kind Code:
B2
Inventors:
Noki Matsui
Southern study
Kayama
Hiroyuki Yano
Southern study
Kayama
Hiroyuki Yano
Application Number:
JP2003157154A
Publication Date:
December 24, 2008
Filing Date:
June 02, 2003
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/304; B24B37/00; C09K3/14; C09K13/00; H01L21/3205; H01L21/321; H01L21/768
Domestic Patent References:
| JP2001131534A | ||||
| JP2001323256A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
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