Title:
CHUCK TABLE AND LASER PROCESSING EQUIPMENT
Document Type and Number:
Japanese Patent JP2022079812
Kind Code:
A
Abstract:
To provide a chuck table capable of easily and inexpensively replacing a holding surface that holds a workpiece.SOLUTION: The chuck table that sucks and holds a workpiece includes: a base table that has a suction path connected to a suction source; a support member mounted on the base table to support the workpiece; and a protective plate that is arranged to cover the upper surface of the support member to protect the support member. The protective plate has a plurality of through-holes for transmitting a suction force from the suction source to the workpiece.SELECTED DRAWING: Figure 3
Inventors:
MASUDA YUKIYASU
MORIKAZU YOJI
MORIKAZU YOJI
Application Number:
JP2020190617A
Publication Date:
May 27, 2022
Filing Date:
November 17, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23K26/08; B23K26/364; H01L21/683
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato