CIRCUIT BOARD, ELECTRON BEAM GENERATING DEVICE, ELECTRON BEAM IRRADIATION DEVICE, ELECTRON BEAM EXPOSURE DEVICE, AND MANUFACTURING METHOD

Japanese Patent JP2014197520

A

PROBLEM TO BE SOLVED: To provide a drive circuit that reduces, for example, blur and distortion of an image drawn by a plurality of electron beams.SOLUTION: There is provided a circuit board including a plurality of cells of a predetermined shape having, in a cell region, a circuit region in which an electronic circuit is provided and a non-circuit region except for the circuit region; a processing region in which the plurality of non-circuit regions are adjacently formed without including the circuit region by arranging the plurality of cells; and an insulating part provided in the processing region and electrically insulating the plurality of circuit regions on the same substrate, an electron beam generating device, an electron beam irradiation device, and an electron beam exposure device.

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MIYAGUCHI YUTAKA
MUROYAMA MASANORI

JP2013073603A

October 16, 2014

March 29, 2013

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UNIV TOHOKU

H01J37/305; G03F7/20; H01L21/027

JP2009272573A	2009-11-19
JP2011119750A	2011-06-16
JPH09199388A	1997-07-31
JP2011233869A	2011-11-17
JP2004022877A	2004-01-22
JP2008269242A	2008-11-06
JP2011139018A	2011-07-14
JP2001015868A	2001-01-19
JP2007513460A	2007-05-24
JP2010165854A	2010-07-29
JPH08111196A	1996-04-30
JP2012129303A	2012-07-05

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