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Title:
CIRCUIT ELEMENT
Document Type and Number:
Japanese Patent JPS5372584
Kind Code:
A
Abstract:

PURPOSE: To reduce the dispersion of the inductance value for the circuit element which is used for a high frequency mixture integrated circuit, by securing an inductor by the following procedure: a groove is formed on a semiconductor substrate surface; the surface is covered with an oxide film; and a belt-type or bar-type metal conductor is provided on and along the groove to be fixed to the substrate only at the both ends.


Inventors:
KUSUNOKI KAZUO
Application Number:
JP14884876A
Publication Date:
June 28, 1978
Filing Date:
December 10, 1976
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01F27/00; H01F17/02; H01L21/822; H01L27/04; H01L27/08; (IPC1-7): H01F17/00; H01L27/02; H01L49/02



 
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