Title:
Circulation cooling heating device
Document Type and Number:
Japanese Patent JP6051036
Kind Code:
B2
Abstract:
A circulating cooling/heating device that is configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a reservoir configured to store the circulating fluid; a pump configured to circulate the circulating fluid between the reservoir and the chamber; a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water, the heat exchanger being immersed in the circulating fluid stored in the reservoir; and a heater configured to heat the circulating fluid in the reservoir.
Inventors:
Daisuke Goto
Application Number:
JP2012281844A
Publication Date:
December 21, 2016
Filing Date:
December 25, 2012
Export Citation:
Assignee:
Kelk corporation
International Classes:
H01L21/3065
Domestic Patent References:
| JP10141831A | ||||
| JP2002168551A | ||||
| JP2002022300A | ||||
| JP7029967A | ||||
| JP2001194040A |
Attorney, Agent or Firm:
Intellectual Property Office