PURPOSE: To prevent atmospheric pollution and reduce the amt. of a liq. cleaner used by a method wherein the subject device is so constructed as to avoid the mixing of a clean liq. with a contaminated liq., vapor is recovered by a solvent recovery device and the resulting exhaust gas therein is sent back into a cleaning device.

CONSTITUTION: A cleaning part 1 is provided therein with a vapor tank 18 having a heater 17 near an immersion cleaning tank 9 and so constructed as to introduce therein the liq. cleaner 8 distilled and regenerated by a distillation tank 16. A pump 19 and a filter 20 are provided immediately before each of the immersion cleaning tank 9, tanks 13 and 14 and a spray nozzle 10 to remove the foreign particles in a predetermined size carried in with an object 2 to be cleaned from outside. A cleaning device 21 which does not produce a continuous circulation of the liq., unlike the aforesaid distillation tank 16, introduces the contaminated liq. cleaner 8 from the distillation tank 16 into a constant feed distillation container 30 and heats a distillation container 31 by a heating source 29, whereby the liq. cleaner 8 in the distillation container 30 is completely evaporated. The distillation container 30 is then taken out to dispose the waste remaining therein.