Title:
WASHING APPARATUS
Document Type and Number:
Japanese Patent JP2016115776
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a washing apparatus capable of appropriately washing the lower surface side even when a washing target is warped.SOLUTION: A washing apparatus (44) for washing the lower surface side of a disc-like washing target (11) comprises: rotation holding means (50) which holds and rotates the washing target; washing means (52) which washes the lower surface side of the washing target. The washing means comprises: a cylindrical washing member (70); washing liquid supply means (78) which supplies the washing member with washing liquid; a washing member rotation motor (74) which is connected to one end side of the washing member so as to rotate the washing member; a bearing member (76) which supports the other end side of the washing member; a support member (82) which supports, from below, the washing member rotation motor and the bearing member; and vertical movement means (84) which is connected to the lower side of the support member, and which supports the support member such that both ends of the washing member vertically move together with the lower surface of the washing target, while vertically moving the entire part of the washing member.SELECTED DRAWING: Figure 2
Inventors:
MINATO KOKICHI
Application Number:
JP2014252211A
Publication Date:
June 23, 2016
Filing Date:
December 12, 2014
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/304
Domestic Patent References:
| JP2013239498A | 2013-11-28 | |||
| JPH08139062A | 1996-05-31 | |||
| JPH07211677A | 1995-08-11 | |||
| JP2010006529A | 2010-01-14 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto