To provide a method and an apparatus for cleaning an electronic part by electrolyzing an electrolyte containing a fluoride ion in the efficiency higher than usual to produce washing water having excellent cleaning efficiency and using the produced washing water.
This electronic part cleaning method comprises a step to use the washing water which contains a fluorine-containing component and is obtained by electrolyzing the water containing the fluoride ion by using an electrode 4a having electrically conductive diamond. This fluorine-containing component produced by electrolyzing the fluoride ion by using the electrode 4a has the cleaning effect stronger than that of the fluoride ion itself before the electrolysis or that of the fluorine-containing component obtained by electrolyzing the fluoride ion by using another electrode. Therefore, the usage of hydrofluoric acid can be saved remarkably.
COPYRIGHT: (C)2004,JPO
Kenichi Uemura
Masaaki Kato
Kuniaki Yamada
Yoshinori Nishiki
Furuhito Tsuneto
Chlorin Engineers Co., Ltd.
Permelec Electrode Co., Ltd.
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Noritsugu Nakama
Hiroyuki Mori